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NEW ENI ACG-10B-02 RF Plasma Generator Comes with a manual and what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from ENI/MKS and may vary slightly due to upgrades, options or revisions this unit may or may not have. The item is new in the box. However, we have no way to test it. 1000W High-Frequency RF Power for Plasma Applications: * Microprocessor-Based Control AC Input: 200-240 VAC, 20A, 50/60 Hz Frequency/ Stability: 13.56MHz / ±0.005% Rated Power Output: 1,000W into 50 Ohm load Mismatched Power Output (Worst phase forward power referenced to rating): * 1000W nominal into 1.5:1 VSWR * 850W nominal into 2.0:1 VSWR * 650W nominal into 3.0:1 VSWR Dynamic Power Range: < 5W to 1000W Load Impedance Range: Unlimited RF Stability/Spurious Output: Unconditionally stable for any load within operational limits / < -60dBc Harmonic Output/Distortion: < -55dBc Load Mismatch Protection: Automatic; forward power limits typically 0.1ms after reverse power reaches 200W or power amplifier current exceeds preset limit. Front Panel or Remote Power Control Range: 0 to +10VDC; Slope: 100W/V AC Line-to-Power: 0.1% typical, 0.5% max. change in output power over rated AC line voltage range. Regulation Tolerance: referenced from Set Point; subject to limits of Forward & Reverse Power and Current. Accuracy relative to ENI Power Standard. Reg. Tolerance: ±1.5% SP ±5W Linearity (deviation from straight line): Power Range: < 800W Linearity: < 3W typical Power Range: > 800W Linearity: < 6W typical Primary AC Power Source (190-252VAC selectable in 4 ranges with taps per table below; single phase 47-63Hz at 20A or less at full power output.): Cooling System: Forced air; maximum ambient air temperature of +40°C. 0 to 1200W Fwd/Rev power display on front panel; accuracy is ±4% of full scale. Dimensions (excluding handles, connectors & feet ): (H x W x D) 9.9" x 15.5" x 18.5" nominal (251.5 x 393.7 x 469.9 mm.) RF Power On: TTL compatible; switch contacts External Control: 0-10VDC positive pulse input, external potentiometer RF On & Maximum RF Power Indicators: TTL compatible Forward & Reverse Power Indicators: Factory set to 1.00V per kW; direct reading on digital voltmeter (New mks eni acg-10B-02 1KW rf generator made for mrc was posted and is owned by: Lynne Mathews) |
l_mathews@chicagopartsnetwork.com (Lynne Mathews) for more information.
